Block Copolymer Nanolithography for Sub-50 nm Structure Applications
- Författare
- Anette Löftstrand
- (Anette Löfstrand.)
- Genre
- Statlig publikation, theses
- Språk
- Engelska
Förlag | År | Ort | Om boken | ISBN |
---|---|---|---|---|
Division of Solid State Physics, Department of Physics, Faculty of Engineering, Lund University | 2021 | Sverige, Lund | online resource ([3], 96 sidor) illustrationer | 978-91-8039-043-9 |
Division of Solid State Physics, Department of Physics, Faculty of Engineering, Lund University, Media-tryck | 2021 | Sverige, Lund, Lund | 93 sidor illustrationer 24 cm | 978-91-8039-044-6 |