Cathodic arc synthesis of Ti-Si-C-N thin films - plasma analysis and microstructure formation
- Författare
- Anders Eriksson
- (Anders Eriksson.)
- Genre
- theses
- Språk
- Engelska
| Förlag | År | Ort | Om boken | ISBN |
|---|---|---|---|---|
| Department of Physics, Chemistry and Biology (IFM), Linköping University | 2012 | Sverige, Linköping | 1 onlineresurs (xvi,151 sidor) illustrationer | |
| Department of Physics, Chemistry and Biology (IFM), Linköping University | 2012 | Sverige, Linköping | xvi,151 sidor illustrationer | 978-91-7519-714-2 |