Digest of papers : microprocesses and nanotechnology '99 : 1999 International Microprocesses and Nanotechnology Conference, July 6-8, 1999, Yokohama, Japan / sponsored by the Japan Society of Applied Physics technical-cosponsored by IEEE Electron Device Society cooperation, American Vacuum Society and seven others

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Japan) (1999 International Microprocesses and Nanotechnology Conference Yokohama
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