Electron microscopy investigation of detailed microstructures of CVD TiAIN and TiN coatings - effects of gas flow and substrate on coatings microstructure

Författare
Ren Qiu
(Ren Qiu.)
Genre
theses
Språk
Engelska
Förlag År Ort Om boken ISBN
Department of Physics, Chalmers University of Technology 2020 Sverige, Göteborg xii, 43 sidor. illustrationer