Metal Impurities in Silicon- and Germanium-Based Technologies - Origin, Characterization, Control, and Device Impact
- Författare
- Cor. Claeys
- (Cor Claeys, Eddy Simoen.)
- Språk
- Engelska
| Förlag | År | Ort | Om boken | ISBN |
|---|---|---|---|---|
| Springer International Publishing, Imprint: Springer | 2018 | Tyskland, Cham | XXXIII, 438 sidor. 215 illus., 207 illus. in color. online resource. | 978-3-319-93925-4 |