New trends in ion beam processing from ions and cluster ion beams to engineering issues - proceedings of the E-MRS '95 Spring Meeting : Symp. J on Correlated Effects in Atomic and Cluster Ion Bombardment and Implantation : Symp. C on Pushing the Limits of Ion Beam Processing - From Engineering to Atomic Scale Issues, Strasbourg, France, May 22-26, 1995

Författare
European Materials Research Society
(Editors P.L.F. Hemment, J.-P. Thomas.)
Genre
Konferenspublikation
Språk
Engelska
Förlag År Ort Om boken ISBN
North-Holland 1996 Nederländerna, Amsterdam xv, 355 sidor. ill., diagr., tab.