Papers from the 41st National Symposium of the American Vacuum Society, Colorado Convention Center, Denver, Colorado 24-28 October 1994 P. 1, Vacuum technology. Electronic materials. Plasma science. Thin film. Vacuum metallurgy
- Författare
- American Vacuum Society
- Genre
- Konferenspublikation
- Språk
- Engelska
Förlag | År | Ort | Om boken | ISBN |
---|---|---|---|---|
American Institute of Physics | 1995 | USA, New York | S. 503-1216 ill. |