Plasma characterization & thin film growth and analysis in highly ionized magnetron sputtering
- Författare
- Jones Alami
- (Jones Alami.)
- Genre
- theses
- Språk
- Engelska
| Förlag | År | Ort | Om boken | ISBN |
|---|---|---|---|---|
| Plasma and Coatings Physics Division, Department of Physics and Measurement Technology, Linköping University, Unitr. | 2005 | Sverige, Linköping, Linköping | 54 sidor illustrationer | |
| Linköping University Electronic Press | 2005 | Sverige, Linköping | 1 onlineresurs (54 sidor) illustrationer |