Proceedings of the Workshop on High-Density Plasma Techniques and Processes for Integrated Circuit Fabrication P. 1 - proceedings of the fifth International Conference on Scanning Tunneling Microscopy/Spectroscopy and the first International Conference on Nanometer Scale Science and Technology

Författare
Workshop on High-Density Plasma Techniques and Processes for Integrated Circuit Fabrication 1990) (Baltimore :
Genre
Konferenspublikation
Språk
Engelska
Förlag År Ort Om boken ISBN
1991 USA xxviii, sidor. 197-384
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