Proceedings of the Workshop on High-Density Plasma Techniques and Processes for Integrated Circuit Fabrication P. 1 - proceedings of the fifth International Conference on Scanning Tunneling Microscopy/Spectroscopy and the first International Conference on Nanometer Scale Science and Technology
- Författare
- Workshop on High-Density Plasma Techniques and Processes for Integrated Circuit Fabrication 1990) (Baltimore :
- Genre
- Konferenspublikation
- Språk
- Engelska
Förlag | År | Ort | Om boken | ISBN |
---|---|---|---|---|
1991 | USA | xxviii, sidor. 197-384 | ||