Proceedings of the Workshop on High-Density Plasma Techniques and Processes for Integrated Circuit Fabrication - proceedings of the fifth International Conference on Scanning Tunneling Microscopy/Spectroscopy and the first International Conference on Nanometer Scale Science and Technology : 23-27 July 1990, Baltimore, Maryland USA
- Författare
- Workshop on High-Density Plasma Techniques and Processes for Integrated Circuit Fabrication 1990) (Baltimore :
- (Special editors for the proceedings: Richard J. Colton, Christie R.K. Marrian and Joseph A. Stroscio.)
- Genre
- Konferenspublikation
- Språk
- Engelska
| Förlag | År | Ort | Om boken | ISBN |
|---|---|---|---|---|
| 1991 | USA, New York | 2 vol. | ||
| 1991 | USA | xxviii, sidor. 197-384 | ||