Semiconductor materials analysis and fabrication process control - proceedings of Symposium D on Diagnostic Techniques for Semiconductor Materials Analysis and Fabrication Process Control of the 1992 E-MRS Spring Conference : Strassbourg, France, June 2-5, 1992
- Författare
- Symposium D on Diagnostic Techniques for Semiconductor Materials Analysis and Fabrication Process Control 1992) (Strassbourg :
- (Edited by G.M. Crean ..)
- Genre
- Konferenspublikation
- Språk
- Engelska
| Förlag | År | Ort | Om boken | ISBN |
|---|---|---|---|---|
| 1993 | Nederländerna | 338 sidor. |