Toward Energy-efficient Physical Vapor Deposition - Routes for Replacing Substrate Heating during Magnetron Sputtering by Employing Metal Ion Irradiation
- Författare
- Xiao Li
- (Xiao Li.)
- Genre
- Avhandlingar, theses
- Språk
- Engelska
| Förlag | År | Ort | Om boken | ISBN |
|---|---|---|---|---|
| Department of Physics, Chemistry and Biology, Linköping University | 2023 | Sverige, Linköping | xiv, 41 sidor illustrationer | 978-91-8075-241-1 |
| Department of Physics, Chemistry and Biology, Linköping University | 2023 | Sverige, Linköping | 1 onlineresurs (xiv, 40 sidor) illustrationer | 978-91-8075-242-8 |