Ultra clean processing of semiconductor surfaces XII : selected, peer reviewed papers from the 12th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) September 21-24, 2014, Brussels, Belgium / edited by Paul Mertens, Marc Meuris and Marc Heyns
- Författare
- Belgium) 2014 : (12th International Symposium on Ultra Clean Processing of Semiconductor Surfaces Brussels
- Språk
- Okänt
| Förlag | År | Ort | Om boken | ISBN |
|---|---|---|---|---|
| TTP | uuuu-uuuu | Utgivningsland okänt / Ej specificerat | ||
| TTP | uuuu-uuuu | Utgivningsland okänt / Ej specificerat | 978-3-03826-626-6 |